1. Equipment Overview

Phosphorus and boron inspection furnaces are devices used for suspension zone melting purification and suspension single crystal growth. Mainly used for purification and single crystal growth of zone melting silicon, it has been used in industrial production of semiconductor materials.

The structure of the phosphorus and boron inspection furnace consists of two parts, namely the furnace chamber and mechanical transmission part, as well as the electrical control cabinet and high-frequency generator part. The furnace chamber is a stainless steel water jacket type vertical container that can pump high vacuum or inject flowing argon gas. Insert the upper and lower shafts from the top and bottom of the furnace chamber, with a polycrystalline silicon rod clamped at the lower end of the upper shaft and a seed crystal clamped at the top of the lower shaft. The furnace room is equipped with a single turn high-frequency heating coil. The upper and lower axes can rotate and lift separately. The electrical control cabinet is equipped with indicating instruments, speed control knobs, and button switches. The cabinet is equipped with a motor control system, etc. The frequency of the high-frequency generator is 2-2.5MHz and the power is 30kw. The structure of the furnace is shown in the figure.

2. Main technical specifications

The TDL FZ26A (P) type phosphorus inspection furnace and TDL FZ26A (B) type boron inspection furnace are heated with an intermediate frequency power supply in an inert gas atmosphere to locally heat rare earth metal rods to a molten state, causing impurities that are easily soluble in the liquid phase to move towards the melting zone (i.e. the top), while impurities that are difficult to dissolve in the liquid phase deposit in the solid phase (end) in the opposite direction of the melting zone movement. After multiple zone melting, the two ends of the metal rod are cut off, the middle part is retained, and the zone melting is carried out again, A specialized equipment for obtaining higher purity rare earth metals.